Ultrathin nanoscale membranes, methods of making, and uses thereof
AssigneeUniversity of Rochester
InventorsChristopher C. Striemer, Philippe M. Fauchet
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Abstract
A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, and a lateral length to thickness aspect ratio that is more than 10,000 to 1 is disclosed. Also disclosed are methods of making such membranes, and use thereof in a number of devices including fuel cells, sensor devices, electrospray devices, and supports for examining a sample under electron microscopy.
Claims32
A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 100 nm, a lateral length to thickness aspect ratio that is more than 10,000 to 1, a surface roughness of less than about 1 nm, and wherein the membrane is formed of a semiconductor material selected from the group of silicon, germanium, silicon or germanium alloys, p-doped silicon or germanium, and n-doped silicon or germanium.
A nanoscale membrane exposed on opposite sides thereof and having an average thickness of less than about 30 nm, a lateral length to thickness aspect ratio that is more than 10,000 to 1, and wherein the membrane is formed of a semiconductor material selected from the group of silicon, germanium, silicon or germanium alloys, p-doped silicon or germanium, and n-doped silicon or germanium.
Dependencies are inferred from the claim text.