Thin plate container with a stack of removable loading trays
AssigneeMiraial Co., Ltd.
InventorYukihiro Hyobu
Life of this patent
Estimating the term…
Abstract
A thin plate container includes: a tray stack for holding and housing semiconductor wafers in spaces between a plurality of stacked, removable loading trays; and an external container for housing the tray stack. At opposite ends of each of the loading trays, a pair of grips for engagement by a processing arm of an external apparatus is provided. The external container includes: a container body; a lid; a sealing material provided between the lid and the container body to seal the inside; a pair of tray stack supporters for supporting the tray stack; and tray stack retainers for holding and supporting the tray stack housed in the container body from above and below.
Claims17
A thin plate container comprising:
- a tray stack for housing a thin plate in a space defined between adjacent loading trays, the tray stack including a plurality of removable loading trays stacked for coupling together;
- a pair of grips provided at both opposing ends of each of the loading trays of the tray stack for gripping by a processing arm of external apparatus;
- an external container for housing the tray stack, the external container comprising a bag-shaped container body having an opening at one end;
- a lid for covering the opening of the container body;
- a sealing material, provided between the lid and the container body, for airtightly isolating the interior of the container body from an external environment;
- and
- a pair of tray stack supporters, respectively provided on two opposing inner surfaces of the container body, for supporting the tray stack.
A thin plate container comprising:
- a tray stack including a plurality of removable loading trays coupled to each other in a stack, with adjacent loading trays defining a space there between for holding a thin plate;
- one or more base trays having a mechanical interface for engagement of the tray stack by an external apparatus, one or more of the loading trays being coupled with one surface of a base tray and a remainder of the plurality of loading trays being inserted between the base trays;
- coupling means adapted to independently couple and decouple the loading trays or a base tray and a loading tray;
- and
- a loading portion, provided on each of the loading trays, for loading the thin plate between adjacent loading trays or between a loading tray and a base tray.
Dependencies are inferred from the claim text.