Temperature control method and temperature control device

A temperature control method comprising:

• providing a heat conduction part having a first surface and a second surface opposite to the first surface, the first surface having a configuration corresponding to a configuration of a controlled part, the second surface being larger in surface area than the first surface, and side surfaces of the heat conduction part between the first surface and the second surface having a tapered shape;
• arranging the controlled part to contact the first surface of the heat conduction part;
• and
• driving at least one of a heating unit and a cooling unit to set the controlled part at a first temperature, the heating unit and the cooling unit being disposed on the second surface of the heat conduction part so that the heating unit and the cooling unit are arranged side by side.