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US 7,921,859 B2Granted
Method and apparatus for an in-situ ultraviolet cleaning tool
AssigneeSematech, Inc.
InventorsAbbas Rastegar, Yoshiaki Ikuta
Life of this patent
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Abstract
The present invention provides an apparatus and a method for an ultraviolet cleaning tool. The cleaning tool includes ultraviolet source spaced apart from a surface having contaminant particles. The ultraviolet source can create ozone between the surface and the ultraviolet source which breaks the chemical bonds between particles and the surface. The apparatus includes a gas feed which introduces a gas to aid the chemical bond. Additionally, the gas feed can introduce a gas to remove the particles from the surface.
Claims17
A cleaning tool for removing particles from a surface comprising:
- a chuck for receiving a surface having particles thereon;
- an ultraviolet light source for applying ultraviolet light to the surface, the ultraviolet light source being spaced apart from the surface;
- a liquid source for providing liquid between the surface and the ultraviolet light source substantially simultaneous with the application of ultraviolet light to the surface, the liquid forming a liquid layer in contact with the ultraviolet light source and with the surface during the application of ultraviolet light to the surface;
- and
- an arm coupled to the ultraviolet light source and to the liquid source, the arm configured for lateral movement and vertical movement of the ultraviolet light source and the liquid source.
2 more elements
Dependencies are inferred from the claim text.