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US 7,921,805 B2Granted
Deposition from liquid sources
AssigneeASM America, Inc.
InventorsMichael A. Todd, Ivo Raaijmakers
Life of this patent
Estimating the term…
Abstract
A liquid injector is used to vaporize and inject a silicon precursor into a process chamber to form silicon-containing layers during a semiconductor fabrication process. The injector is connected to a source of silicon precursor, which preferably comprises liquid trisilane in a mixture with one or more dopant precursors. The mixture is metered as a liquid and delivered to the injector, where it is then vaporized and injected into the process chamber.
Claims20
A system for semiconductor processing, comprising:
- a process chamber, wherein the process chamber has an interior volume;
- a liquid injector configured to convert a liquid into a gas, wherein the liquid injector is in fluid communication with the interior volume;
- a precursor source feeding into the liquid injector, wherein the precursor source comprises a liquid silicon precursor having the chemical formula SinH2n+2, where n≧3;
- and
- a liquid mass flow controller for metering the liquid precursor, wherein the controller is in line between the precursor source and the liquid injector;
- and
- wherein the liquid injector comprises a porous matrix in a flow path of the liquid silicon precursor to the interior volume, the porous matrix configured to vaporize the liquid silicon precursor.
4 more elements
A liquid injection system for semiconductor processing, comprising:
- a liquid vaporizer, the liquid vaporizer configured to release a liquid silicon precursor as a vapor;
- and
- a liquid silicon precursor source, the liquid silicon precursor source in liquid communication with the liquid injector;
- and
- a mass flow controller and valves connecting the liquid precursor source and the liquid vaporizer, the mass flow controller and valves configured to meter the liquid silicon precursor in liquid form,
- wherein the liquid silicon precursor source comprises trisilane;
- and
- wherein the liquid vaporizer comprises a porous matrix for vaporizing the liquid silicon precursor.
5 more elements
Dependencies are inferred from the claim text.