Method for fabricating a cylinder-type capacitor utilizing a connected ring structure
AssigneeHynix Semiconductor Inc.
InventorsJae-Sung Roh, Kee-Jeung Lee, Han-Sang Song, Seung-Jin Yeom, Deok-Sin Kil, Young-Dae Kim, Jin-Hyock Kim
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Abstract
A method for fabricating a capacitor includes forming an isolation layer over a substrate. The isolation layer forms a plurality of open regions. Storage nodes are formed on surfaces of the open regions. An upper portion of the isolation layer is etched to expose upper outer walls of the storage nodes. A sacrificial layer is formed over the isolation layer to enclose the upper outer walls of the storage nodes. The isolation layer and the sacrificial layer are then removed.
Claims30
A method for fabricating a capacitor, comprising:
- forming an isolation layer over a substrate, the isolation layer forming a plurality of open regions;
- forming storage nodes on surfaces of the open regions;
- etching an upper portion of the isolation layer to expose upper outer walls of the storage nodes;
- forming a sacrificial layer over the isolation layer, wherein the sacrificial layer is formed in a connected ring structure that encloses the upper outer walls of the storage nodes;
- with the connected ring structure supporting the storage nodes, removing the isolation layer;
- and
- removing the connected ring structure.
A method for fabricating a capacitor, comprising:
- forming an isolation layer over a cell region and a peripheral region of a substrate, the isolation layer forming a plurality of open regions in the cell region;
- forming storage nodes on surfaces of the open regions;
- etching an upper portion of the isolation layer to expose upper outer walls of the storage nodes;
- forming a sacrificial pattern over the isolation layer, wherein the sacrificial pattern is formed in a connected ring structure that encloses the upper outer walls of the storage nodes;
- etching the isolation layer in the peripheral region to expose side portions of the resultant structure obtained after forming the sacrificial pattern;
- with the connected ring structure supporting the storage nodes, removing the isolation layer in the cell region;
- and
- removing the connected ring structure.
Dependencies are inferred from the claim text.