Back to results
US 7,907,035 B2Granted
MEMS resonator array structure and method of operating and using same
AssigneeRobert Bosch GmbH
InventorsMarkus Lutz, Zhiyu Pan, Aaron Partridge
Life of this patent
Estimating the term…
Abstract
A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one direction/dimension. The MEMS array structure may include a plurality of sense electrodes and drive electrodes spaced apart from the plurality of bulk mode resonators by a gap. The MEMS array structure may further include at least one anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.
Claims39
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
- and
- at least one anchor coupling section including a first anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.
1 more element
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- and
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator,
- wherein the first bulk mode resonator and the second bulk mode resonator are coupled to a common substrate anchor.
1 more element
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
- a plurality of sense electrodes to provide a sense signal indicative of oscillation of at least one of the plurality of bulk mode resonators;
- sense circuitry to receive the sense signal and to provide an output signal in response thereto;
- a plurality of drive electrodes to receive a drive signal to induce at least one of the plurality of bulk mode resonators to oscillate;
- and
- drive circuitry to receive the output signal and to provide the drive signal in response thereto.
4 more elements
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- a first plurality of electrodes disposed juxtaposed the first bulk mode resonator;
- a second plurality of electrodes disposed juxtaposed the second bulk mode resonator, wherein at least one electrode of the first plurality of electrodes is coupled to at least one electrode of the second plurality of electrodes via circuitry;
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
- and
- at least one anchor coupling section including a first anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.
3 more elements
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- a first plurality of electrodes to receive a drive signal and induce oscillation of the first bulk mode resonator;
- and
- a second plurality of electrodes to receive the drive signal and induce oscillation of the second bulk mode resonator, wherein at least one electrode of the first plurality of electrodes is coupled to at least one electrode of the second plurality of electrodes via drive circuitry;
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
- and
- at least one anchor coupling section including a first anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.
4 more elements
A MEMS array structure comprising:
- a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
- a first plurality of electrodes to sense oscillation of the first bulk mode resonator;
- a second plurality of electrodes to sense oscillation of the second bulk mode resonator;
- and
- wherein at least one of the first plurality of electrodes is coupled to at least one of the second plurality of electrodes via sense circuitry;
- at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
- and
- at least one anchor coupling section including a first anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.
5 more elements
Dependencies are inferred from the claim text.