Device with flow sensor for handling fluids
AssigneeSensirion AG
InventorUlf Kanne
Life of this patent
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Abstract
A channel substrate containing at least one channel for a fluid is provided. A sensor substrate carrying a thermal flow sensor is arranged adjacent to the channel substrate. The flow sensor contains at least one temperature sensor and at least one heater, which are integrated on the sensor substrate. The heater and the temperature sensor are in thermal contact with the channel in the channel substrate. This arrangement allows to measure the flow of the fluid in the channel, which provides an improved monitoring and control. The sensor substrate can have contact pads connected to bond wires or, using flip-chip technology, the contact pads can be connected to circuit paths to the channel substrate.
Claims19
A device for handling fluids comprising
- a channel substrate,
- at least one channel arranged in said channel substrate for receiving the fluid, wherein said channel is formed by at least one recess in said channel substrate,
- a sensor substrate arranged at said channel substrate, and
- a thermal flow sensor arranged on said sensor substrate, said flow sensor comprising a heater and at least one temperature sensor integrated on the sensor substrate,
- wherein said channel substrate comprises a cover layer covering and closing said recess, and wherein the heater and the temperature sensor are in thermal contact with said cover layer and thereby with said channel, and
- wherein said sensor substrate is arranged on an outer side of said cover layer.
A device for handling fluids comprising
- a channel substrate,
- at least one channel arranged in said channel substrate for receiving the fluid,
- a sensor substrate arranged at said channel substrate, and
- a thermal flow sensor arranged on said sensor substrate, said flow sensor comprising a heater and at least one temperature sensor integrated on the sensor substrate,
- wherein the heater and the temperature sensor are in thermal contact with said channel,
- wherein the sensor substrate comprises contact pads arranged on a side of the sensor substrate that faces said channel substrate and
- wherein the contact pads are arranged at a part of the sensor substrate that laterally projects over said channel substrate.
A device for handling fluids comprising
- a channel substrate,
- at least one channel arranged in said channel substrate for receiving the fluid,
- a sensor substrate arranged at said channel substrate,
- a thermal flow sensor arranged on said sensor substrate, said flow sensor comprising a heater and at least one temperature sensor integrated on the sensor substrate,
- circuit paths mounted to and arranged on said channel substrate,
- wherein the heater and the temperature sensor are in thermal contact with said channel, and wherein said sensor substrate is electrically connected to said circuit paths.
A device for handling fluids comprising
- at least one channel arranged in said channel substrate for receiving the fluid,
- a sensor substrate arranged at said channel substrate,
- a thermal flow sensor arranged on said sensor substrate, said flow sensor comprising a heater and at least one temperature sensor integrated on the sensor substrate,
- circuit paths mounted to and arranged on said channel substrate,
- wherein the heater and the temperature sensor are in thermal contact with said channel, and wherein said sensor substrate is electrically connected to said circuit paths
- wherein metal bumps are provided for electrically connecting said sensor substrate to said circuit paths, and wherein said sensor substrate and said channel substrate are arranged in non-parallel fashion with a wedge-shaped gap therebetween.
A device for handling fluids comprising
- a channel substrate having a cover layer, an upper plate and a lower plate,
- at least one channel arranged in said first and second plate of said channel substrate for receiving the fluid, wherein said channel is covered by said cover layer,
- a sensor substrate arranged at an outer side of said cover layer at said channel, and
- a thermal flow sensor arranged on said sensor substrate, said flow sensor comprising a heater and at least one temperature sensor integrated on the sensor substrate,
- wherein the heater and the temperature sensor are in thermal contact with said channel.
Dependencies are inferred from the claim text.