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US 7,902,582 B2Granted
Tantalum lanthanide oxynitride films
AssigneeMicron Technology, Inc.
InventorsLeonard Forbes, Kie Y. Ahn, Arup Bhattacharyya
Life of this patent
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Abstract
Electronic apparatus and methods of forming the electronic apparatus include a tantalum lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The tantalum lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a tantalum lanthanide oxynitride film.
Claims25
An electronic device comprising:
- a substrate;
- and
- a dielectric disposed on the substrate, the dielectric including a layer of TaLnON, the layer of TaLnON having a layered structure of one or more monolayers.
An electronic device comprising:
- a substrate;
- a first conductive layer disposed above the substrate:
- a dielectric disposed on the first conductive layer, the dielectric including a layer of TaLnON, the layer of TaLnON having a layered structure of one or more monolayers;
- and
- a second conductive layer disposed on the dielectric such that the dielectric is configured as a capacitor dielectric in a capacitor with the first and second conductive layers.
2 more elements
An electronic device comprising:
- a substrate;
- and
- a dielectric disposed, above the substrate, in a transistor, the dielectric including a layer of TaLnON, the layer of TaLnON having a layered structure of one or more monolayers.
An electronic device comprising:
- a substrate;
- and
- a dielectric disposed in a memory configured on the substrate, the dielectric including a layer of TaLnON, the layer of TaLnON having a layered structure of one or more monolayers.
An electronic device comprising:
- a substrate;
- a dielectric disposed on the substrate, the dielectric including a layer of TaLnON, the layer of TaLnON having a layered structure of one or more monolayers;
- and
- a conductive layer disposed in contact with the dielectric, the conductive layer having a layered structure of one or more monolayers.
1 more element
Dependencies are inferred from the claim text.