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US 7,899,557 B2Granted
Input signal analyzing system and control apparatus using same
AssigneeASM Japan K.K.
InventorsMasahiro Takizawa, Kazuyoshi Ishigaya, Kunio Ootani
Life of this patent
Estimating the term…
Abstract
For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8, data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10, by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11, communication abnormality is detected.
Claims22
A signal analyzing system comprising:
- a control side computer containing a control unit configured to receive input signal data and provide an output to a control apparatus, said control side computer further containing a control signal data blocking unit configured to map information in a data analyzing area of the input signal data, in a control side address space of virtual memory as a control signal data block and transfer the control signal data block to a physical file via a network;
- and
- an analyzing side computer containing the physical file and an analytic signal data blocking unit configured to create map the control signal data block in the physical file, in an analyzing side address space of virtual memory as an analytic signal data block for signal analysis use, said analyzing side computer further containing a signal analyzing unit configured to analyze the input signal data based on the analytic signal data block.
A signal analyzing method comprising the steps of:
- receiving input signal data for a control apparatus;
- mapping, by a first computer, information in a data analyzing area of said input signal data, in a first address space of virtual memory as a control signal data block;
- transferring, by the first computer, the control signal data block to a physical file via a network;
- mapping, by a second computer, the control signal data block in the physical file, in a second address space of virtual memory as an analytic signal data block for signal analysis use;
- and
- analyzing said input signal data based on said analytic signal data block.
3 more elements
Dependencies are inferred from the claim text.