Apparatus and method for detecting a rotation
AssigneeInfineon Technologies AG
InventorRobert Aigner
Life of this patent
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Abstract
A rotation sensor has a substrate with a first surface and a second surface. A shear-wave transparent mirror is arranged on the first surface of the substrate, and a shear-wave isolator is arranged above the shear-wave transparent mirror, the shear-wave transparent mirror and the shear-wave isolator being arranged separated from each other to define a Coriolis zone there between. A bulk-acoustic-wave resonator is arranged above the shear-wave isolator, and a shear-wave detector is arranged on the substrate in a direction, in which a shear-wave generated by the bulk-acoustic-wave resonator upon rotation propagates.
Claims31
A rotation detection apparatus, comprising:
- a first generator configured to generate a longitudinal bulk-acoustic-wave that propagates in a propagation direction;
- a second generator configured to generate a shear-wave from the longitudinal bulk-acoustic wave upon rotation by an acting Coriolis force;
- and
- a detector to detect the shear-wave,
- wherein the second generator is arranged in the propagation direction between the first generator and the detector.
A rotation sensor, comprising:
- a substrate;
- a bulk-acoustic-wave generator disposed on the substrate;
- a Coriolis zone arranged in a direction wherein a longitudinal bulk-acoustic-wave generated by the bulk-acoustic-wave generator propagates, and wherein an acting Coriolis force generates a shear-wave upon rotation from the longitudinal bulk-acoustic-wave;
- and
- a shear-wave detector arranged on the substrate in a direction in which the shear-wave propagates.
A rotation sensor, comprising:
- a substrate comprising a first surface and a second surface;
- a shear-wave transparent mirror arranged on the second surface of the substrate;
- a shear-wave isolator over the shear-wave transparent mirror, wherein the shear-wave transparent mirror and the shear-wave isolator are arranged separated from each other to define a Coriolis zone there between;
- a bulk-acoustic-wave resonator over the shear-wave isolator;
- and
- a shear-wave detector arranged on the substrate in a direction in which a shear-wave generated upon rotation from a longitudinal bulk-acoustic-wave generated by the bulk-acoustic-wave resonator propagates.
A method for detecting a rotation, comprising:
- generating a longitudinal bulk-acoustic-wave propagating in a propagation direction;
- and
- generating a shear-wave from the longitudinal bulk-acoustic-wave upon rotation by an acting Coriolis force, the shear-wave being generated in the propagation direction of the longitudinal bulk-acoustic wave;
- and
- detecting the shear-wave generated from the longitudinal bulk-acoustic wave upon rotation.
Dependencies are inferred from the claim text.