Color filter inspection method, color filter manufacturing method, and color filter inspection apparatus

An apparatus for inspecting, for unevenness, a color filter in which each pixel is surrounded by a black matrix, the apparatus comprising:

• illuminating means for illuminating a color filter edge at an angle of incidence inclined at not less than 0 degree to less than (90+α) degrees to a line normal to that principal surface of a substrate on which the color filter has been formed or at an angle of incidence inclined at not less than 0 degree to less than (90−α) degrees to the line normal to the principal surface of the substrate, the color filer edge containing a boundary between the pixel and the black matrix, α being an average degree of inclination of the color filter edge that is not less than 0 degree to less than 90 degrees;
• imaging means for taking at least two images of light reflected by the color filter edge at an angle of reflection, different from the angle of incidence, which is not less than 0 degree to less than (90−α) degrees when the angle of incidence is not less than 0 degree to less than (90+α) degrees or is not less than 0 degree to less than (90+α) degrees when the angle of incidence is not less than 0 degree to less than (90−α) degrees;
• shot-image information analyzing means for calculating a difference in luminance within the color filter in accordance with the images thus taken;
• and
• unevenness determining means for determining the existence of unevenness of the color filter from the difference in luminance.