Specimen inspection stage implemented with processing stage coupling mechanism

A method of using a laser-based system to process and inspect a specimen, comprising:

• providing a specimen processing stage for movement on a substrate on which the specimen is mounted during processing and inspection, the specimen processing stage carrying laser beam propagation path-directing optical components that are movable on the substrate in response to an applied motive force;
• providing a specimen inspection stage for movement on the substrate, the specimen inspection stage carrying optical inspection equipment characterized by a substantially large mass and having a home position when parked at rest;
• providing a coupling device for releasably coupling the specimen inspection stage and the specimen processing stage to each other;
• moving the specimen processing stage to position the laser beam relative to the specimen to process it and, thereafter, to position the coupling device to couple the specimen inspection stage and the specimen processing stage to each other;
• moving the coupled specimen processing and inspection stages in tandem to position the optical inspection equipment relative to the specimen to inspect it and, thereafter, to park on the specimen inspection stage at the home position;
• and
• uncoupling the specimen processing and inspection stages and, thereafter, moving the specimen processing stage away from the parked specimen inspection stage.