Solid-state imaging device comprising a signal storage section including a highly doped area

A solid-state imaging device having an imaging area in which unit cells each including a photoelectric conversion section and a signal scanning circuit section are arranged in a two-dimensional form on a p-type semiconductor substrate, comprising:

• an n-type semiconductor region which is formed on the semiconductor substrate and in which the photoelectric conversion section is formed;
• a p-type semiconductor region which is formed in the surface of the photoelectric conversion section and in which the signal scanning circuit section is formed;
• and
• a signal storage section which is comprised of a highly doped n-type layer which is formed in the surface of the photoelectric conversion section apart from the p-type semiconductor region and higher in impurity concentration than the photoelectric conversion section,
• the signal storage section having its part overlapped under a signal readout gate adapted to transfer a packet of signal charge from the storage section to the signal scanning circuit section and its part at which the potential becomes deepest overlapped under the readout gate;
• wherein the signal storage section is a region doped with impurities in the photoelectric conversion section, the doping profile of the region being such that the impurity concentration is high at its central part and low at its peripheral part;
• wherein the signal storage section has an impurity density in a central part of the signal storage section being high in either of a horizontal and vertical directions of the semiconductor substrate so that a greater part of the signal charge is stored in a central part of the signal storage section and that a potential profile in the signal storage section becomes deepest in the central part which corresponds in position to one edge of the readout gate.