Substrate splitting apparatus and a method for splitting a substrate

A substrate splitting method comprising the following steps:

• forming a pre-crack on a substrate;
• controlling a servo motor to drive a substrate breaking bar towards the substrate, wherein this step of controlling the server motor further comprises:
• controlling the substrate breaking bar to move in a first speed within a first stroke;
• and
• controlling the substrate breaking bar to move in a second speed within a second stroke, wherein the second stroke is closer to the substrate than the first stroke, and the first speed is greater than the second speed;
• and
• controlling the substrate breaking bar to press the substrate at the pre-crack.

A substrate splitting apparatus comprising:

• a servo motor;
• a transmission device with an end coupled with the servo motor, wherein the transmission device outputs power generated from the servo motor;
• a substrate breaking bar coupled with the transmission device;
• and
• a stage located under the transmission device and the substrate breaking bar, wherein the stage has a load-lock surface corresponding to the substrate breaking bar and the servo motor drives the transmission device to move the substrate breaking bar towards the load-lock surface;
• wherein the substrate breaking bar has a first and a second stroke relative to the load-lock surface, the second stroke is closer to the load-lock surface than the first stroke, within the first stroke the servo motor drives the substrate breaking bar to move in a first speed, within the second stroke the servo motor drives the substrate breaking bar to move in a second speed, and the first speed is greater than the second speed.

A substrate splitting method comprising the following steps:

• forming a pre-crack on a substrate;
• controlling a servo motor to drive a substrate breaking bar towards the substrate;
• and
• controlling the substrate breaking bar to press the substrate at the pre-crack, wherein the step of pressing the substrate pressing includes:
• disposing a pressure sensor to couple with the substrate breaking bar;
• detecting a pressure exerted on the substrate breaking bar by using the pressure sensor;
• and
• halting advance of the substrate breaking bar when the pressure exerted on the substrate breaking bar reaches a pre-determined pressure value.