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US 7,888,844 B2Granted
Temperature control of micromachined transducers
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsDavid Martin, Donald Lee, John Choy, Joel Philliber, Osvaldo Buccafusca
Life of this patent
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Abstract
A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.
Claims13
A micromachined structure, comprising:
- a substrate having a first coefficient of thermal expansion;
- a cavity in the substrate;
- and
- a membrane layer having a second coefficient of thermal expansion and disposed over the substrate and spanning the cavity, wherein the first coefficient of thermal expansion is substantially identical to the second coefficient of thermal expansion;
- and
- an annular resonator disposed over the membrane and comprising a first electrode, a second electrode and a piezoelectric layer between the first and second electrodes.
3 more elements
A piezoelectric micromachined transducer (PMT) array, comprising:
- a substrate;
- a plurality of PMTs arranged over the substrate, each of the PMTs comprising:
- a cavity in the substrate;
- membrane layer disposed over the substrate and spanning the cavity;
- an annular resonator disposed over the membrane and comprising a first electrode, a second electrode and a piezoelectric layer between the first and second electrodes.
2 more elements
Dependencies are inferred from the claim text.