Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
AssigneeGeorgia Tech Research Corporation
InventorsFarrokh Ayazi, Logan D. Sorenson
Life of this patent
Estimating the term…
Abstract
A micro-electromechanical resonator self-compensates for process-induced dimensional variations by using a resonator body having a plurality of perforations therein. These perforations may be spaced along a longitudinal axis of the resonator body, which extends orthogonal to a nodal line of the resonator body. These perforations, which may be square or similarly-shaped polygonal slots, may extend partially or entirely though the resonator body and may be defined by the same processes that are used to define the outer dimensions (e.g., length, width) of the resonator body.
Claims14
A micro-electromechanical resonator, comprising:
- a resonator body anchored to a substrate by a pair of tethers that suspend said resonator body opposite an underlying opening in the substrate, said resonator body having a plurality of perforations therein that extend through the resonator body and expose the underlying opening in the substrate, said resonator body separated from the substrate by a pair of trenches that surround a majority of the resonator body.
A thin-film piezoelectric-on-substrate resonator, comprising:
- a resonator body anchored to a substrate by a pair of tethers that suspend said resonator body opposite an underlying opening in the substrate, said resonator body having a plurality of perforations therein that extend along a longitudinal axis of said resonator body that is orthogonal to a nodal line of said resonator body and extend through the resonator body to expose the underlying opening in the substrate, said resonator body separated from the substrate by a pair of trenches that surround a majority of the resonator body.
Dependencies are inferred from the claim text.