Semiconductor device and producing method of the same
AssigneeKabushiki Kaisha Toshiba
InventorsKazumasa Tanida, Masahiro Sekiguchi, Ninao Sato, Kenji Takahashi
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AssigneeKabushiki Kaisha Toshiba
InventorsKazumasa Tanida, Masahiro Sekiguchi, Ninao Sato, Kenji Takahashi
Estimating the term…
A semiconductor device includes a semiconductor substrate having a through hole. An active layer is formed on a first surface of the semiconductor substrate. An inner wall surface of the through hole, a bottom surface of the through hole closed by the active layer and a second surface of the semiconductor substrate are covered with an insulating layer. A first opening is formed in the insulating layer which is present on the bottom surface of the through hole. A second opening is formed in the insulating layer which is present on the second surface of the semiconductor substrate. A first wiring layer is formed from within the through hole onto the second surface of the semiconductor substrate. A second wiring layer is formed to connect to the second surface through the second opening.
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.