Back to results
US 7,888,775 B2Granted
Vertical diode using silicon formed by selective epitaxial growth
AssigneeInfineon Technologies AG
InventorsChristian Russ, Christian Pacha, Snezana Jenei, Klaus Schruefer
Life of this patent
Estimating the term…
Abstract
Some embodiments relate to an apparatus that exhibits vertical diode activity to occur between a semiconductive body and an epitaxial film that is disposed over a doping region of the semiconductive body. Some embodiments include an apparatus that causes both vertical and lateral diode activity. Some embodiments include a gated vertical diode for a finned semiconductor apparatus. Process embodiments include the formation of vertical-diode apparatus.
Claims12
An apparatus comprising:
- a semiconductive body, wherein the semiconductive body includes a first doping region and a second doping region, the first doping region and the second doping region being differently doped;
- an epitaxial film disposed above and on the semiconductive body at the first doping region and not at the second doping region;
- and
- a diode junction formed between the semiconductive body and the epitaxial film, wherein the diode junction is configured to allow vertical-diode activity through the diode junction.
1 more element
An apparatus comprising:
- a semiconductive body disposed on a substrate, wherein the semiconductive body includes a first doping region and a second doping region;
- an epitaxial first film disposed above and on the semiconductive body at the first doping region and not at the second doping region;
- a diode junction formed between the semiconductive body and the epitaxial first film, wherein the diode junction is configured to allow vertical-diode activity through the diode junction;
- a silicide first layer disposed on the epitaxial first film;
- a silicide second layer disposed on the second doping region;
- and
- wherein the silicide second layer is vertically closer to the substrate than the silicide first layer.
4 more elements
Dependencies are inferred from the claim text.