Electron microscope with electron spectrometer
AssigneeHitachi High-Technologies Corporation
InventorsShohei Terada, Yoshihumi Taniguchi, Kazutoshi Kaji
Life of this patent
Estimating the term…
Abstract
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.
Claims4
A lens adjustment method for adjusting optimum conditions of a plurality of lenses, wherein:
- exciting currents of the individual plural lenses or values set on the basis of the exciting currents are used as parameters,
- simulation based on a parameter design method is carried out, and
- conditions of exciting currents of said individual lenses are set on the basis of calculation values based on said simulation.
A lens adjustment method for adjusting optimum conditions of a plurality of lenses of an electron spectrometer attached to an electron microscope and adapted to perform energy spectroscopy, wherein:
- exciting currents of the individual plural lenses or values set on the basis of the exciting currents are used as parameters,
- simulation based on a parameter design method is carried out, and
- conditions of exciting currents of said individual lenses are set on the basis of calculation values based on said simulation.
Dependencies are inferred from the claim text.