Photo-assisted hydrogenation process
AssigneeAmethyst Research, Inc.
InventorsTerry D. Golding, Ronald Paul Hellmer
Life of this patent
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Abstract
Apparatus and method are provided for hydrogenating semiconductor or other materials by ultraviolet (UV) radiation in the presence of hydrogen. Hydrogen uptake may be optimized by selection of temperature and wavelength of the UV radiation. Patterned areas may be selectively hydrogenated, such as mesas in Avalanche Photodiode Arrays.
Claims8
A process for hydrogenating a semiconductor, wherein the semiconductor is part of a chip having mesa tops in an array, the process comprising:
- a) providing a vacuum chamber having a sample holder and a source of UV light disposed to provide UV radiation on the sample holder;
- b) placing the semiconductor on the sample holder, degassing the chamber and introducing hydrogen gas to a selected pressure;
- c) placing a mask having a selected pattern between the source of UV light and the semiconductor, wherein selected pattern of the mask provides a selective irradiation of the mesa tops;
- and
- radiating the semiconductor with ultraviolet light for a selected time, wherein the wavelength of the ultraviolet light is less than about 200 nm.
A process for hydrogenating a metal, ceramic or carbon-based material, wherein the material is part of a chip having mesa tops in an array, the process comprising:
- a) providing a vacuum chamber having a sample holder and a source of UV light disposed to provide UV radiation on the sample holder;
- b) placing the metal, ceramic or carbon-based material on the sample holder, degassing the chamber and introducing hydrogen gas to a selected pressure;
- c) placing a mask having a selected pattern between the source of UV light and the metal, ceramic or carbon-based material wherein the selected pattern of the mask provides selected irradiation of the mesa tops;
- and
- d) radiating the metal, ceramic or carbon-based material with ultraviolet light for a selected time, wherein the wavelength of the ultraviolet light is less than about 200 nm.
A process for hydrogenating selected areas of a material, wherein the material is part of a chip having mesa tops in an array, the process comprising:
- a) providing a vacuum chamber having a sample holder and a source of UV light disposed to provide UV radiation on the sample holder;
- b) placing the material on the sample holder, degassing the chamber and introducing hydrogen gas to a selected pressure;
- c) placing a mask having a selected pattern between the source of UV light and the material, wherein the selected pattern of the mask provides selective irradiation of the mesa tops;
- and
- d) radiating the material with ultraviolet light for a selected time, wherein the wavelength of the ultraviolet light is less than about 200 nm.
Dependencies are inferred from the claim text.