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US 7,888,171 B2Granted
Fabricating a gallium nitride layer with diamond layers
AssigneeRaytheon Company
InventorsRalph Korenstein, Steven D. Bernstein, Stephen J. Pereira
Life of this patent
Estimating the term…
Abstract
In one aspect, a method includes fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity. The fabricating includes using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer onto the first diamond layer.
Claims32
A method, comprising:
- fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity greater than the first thermal conductivity, the fabricating comprising:
- using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer of about 2 mils or greater onto the first diamond layer.
A method, comprising:
- fabricating a gallium nitride (GaN) layer with a first diamond layer having a first thermal conductivity and a second diamond layer having a second thermal conductivity twice the first thermal conductivity, the fabricating comprising:
- using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer of between about 2 mils to about 4 mils on the first diamond layer of less than about 1 mil.
A method, comprising:
- fabricating a gallium nitride (GaN) layer with a first diamond layer and a second diamond layer, the fabricating comprising:
- using a microwave plasma chemical vapor deposition (CVD) process to deposit the second diamond layer of at least about 2 mils onto the first diamond layer,
- wherein fabricating a gallium nitride (GaN) layer with a first diamond layer and a second diamond layer comprises fabricating the GaN layer comprising at least one of undoped GaN, doped GaN or GaN combined with another element.
Dependencies are inferred from the claim text.