Antistatic agent, antistatic film and product coated with antistatic film
AssigneeShowa Denko K.K.
InventorsTakashi Ohkubo, Yoshihiro Saida, Shuichi Naijo
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Abstract
The invention relates to an antistatic agent, which comprises a water-soluble electroconductive polymer and a biosurfactant having a hydrophilic site of a molecular weight of 200 to 10,000, excellent in property of preventing film-thinning in chemically amplified resist, and an antistatic film and a coated product obtained by using the antistatic agent.
Claims20
An antistatic agent, which comprises a water-soluble electroconductive polymer and a biosurfactant having a hydrophilic site of a molecular weight of 200 to 10,000, and further comprising a solvent, wherein the water-soluble electroconductive polymer is contained in an amount of 0.1 to 20 mass %, the biosurfactant is contained in an amount of 0.0001 to 1 mass % and the solvent is contained in an amount of 79 to 99.8 mass %.
Dependencies are inferred from the claim text.