Site-selectively modified micro-and nanostructures and the methods of their fabrication
AssigneeHitachi, Ltd.
InventorsKenji Murao, Kosuke Kuwabara, Masahiko Ogino
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AssigneeHitachi, Ltd.
InventorsKenji Murao, Kosuke Kuwabara, Masahiko Ogino
Estimating the term…
It is an object of the present invention to provide a method which can easily and selectively modify specific sites on indentations or protrusions of indentation/protrusion structures fabricated by nano-imprinting. Pressing a mold having indentation/protrusion structures onto a polymer substrate comprising at least two layers of different chemical composition exposes the second layer, which has been covered by the outermost layer, in pillars formed as a result of the pressing. Site-specific chemical modification of the pillars can be achieved by formulating a desired chemical composition for the second layer beforehand, or by chemical modification of the exposed second layer cross-sections in the pillars.
A method for producing a micro- or nano-structure, comprising the steps of:
Dependencies are inferred from the claim text.