Process for producing monocrystal thin film and monocrystal thin film device
AssigneeJapan Science and Technology Agency
InventorSuguru Noda
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Abstract
The present invention provides a method for manufacturing a monocrystalline film and a device formed by the above method, and according to the method mentioned above, lift-off of the monocrystalline silicon film is preferably performed and a high-purity monocrystalline silicon film can be obtained. A monocrystalline silicon substrate (template Si substrate) 201 is prepared, and on this monocrystalline silicon substrate 201, an epitaxial sacrificial layer 202 is formed. Subsequently, on this sacrificial layer 202, a monocrystalline silicon thin film 203 is rapidly epitaxially-grown using a RVD method, followed by etching of the sacrificial layer 202, whereby a monocrystalline silicon thin film 204 used as a photovoltaic layer of solar cells is formed.
Claims42
A method for manufacturing a monocrystalline thin film, comprising;
- (a) preparing a monocrystalline substrate;
- (b) forming a sacrificial layer containing crystal defects on the monocrystalline substrate using the same material by epitaxial growth;
- (c) forming a monocrystalline thin film containing crystal defects on the sacrificial layer using the same material by epitaxial growth, the number of the crystal defects being smaller than that of the sacrificial layer;
- and
- (d) etching the sacrificial layer so as to form a monocrystalline thin film containing a small number of crystal defects.
A method for manufacturing a solar-cell monocrystalline silicon thin film, comprising;
- (a) preparing a monocrystalline silicon substrate;
- (b) forming an epitaxial sacrificial layer on the substrate;
- (c) rapidly forming a monocrystalline silicon thin film containing a smaller number of crystal defects than the sacrificial layer on the sacrificial layer by epitaxial growth using the same material as that of the sacrificial layer;
- and
- (d) etching the sacrificial layer so as to manufacture a monocrystalline silicon thin film to form a photovoltaic layer in a solar-cell.
Dependencies are inferred from the claim text.