Nanopillar arrays for electron emission

An amplifier for increasing the intensity of incident electrons from an electron source;

• said amplifier comprising:
• a semiconductor membrane having an external surface positioned to receive said incident electrons from said electron source and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons, thereby amplifying the intensity of electrons from said electron source.

An electronic device comprising:

• a plurality of electron emission devices;
• wherein each of said electron emission devices comprises:
• a semiconductor membrane having an external surface positioned to receive incident electrons and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons;
• wherein said electron emission devices are provided in a series configuration, such that a first electron emission device is positioned to receive incident electrons from an electron source, thereby generating emitted electrons from said first electron emission device, and wherein a second electron emission device is positioned to receive at least a portion of said electrons emitted said first electron emission device, thereby generating emitted electrons from said second electron emission device.

A detection system for detecting incident electrons;

• said detector comprising:
• a semiconductor membrane having an external surface positioned to receive said incident electrons and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons;
• and
• an electron detector positioned to detect at least a portion of said electrons emitted by said nanopillars on said internal surface.

A system for generating electrons comprising:

• an electron source for generating incident electrons;
• a semiconductor membrane having an external surface positioned to receive said incident electrons from said electron source and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface, wherein electrons or charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons, thereby generating electrons.

A method for increasing the intensity of incident electrons from an electron source;

• said method comprising the steps:
• providing said electron source for generating incident electrons;
• providing an electron amplifier comprising:
• a semiconductor membrane having an external surface positioned to receive said incident electrons from said electron source and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface;
• and
• exposing said electron amplifier to said incident electrons from said electron source, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons, thereby increasing the intensity of incident electrons from said electron source.

A method for detecting incident electrons;

• said method comprising the steps:
• providing a detector comprising:
• a semiconductor membrane having an external surface positioned to receive said incident electrons and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• an array of semiconductor nanopillars provided in electrical contact with said internal surface, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons;
• and
• an electron detector positioned to detect electrons emitted by said nanopillars;
• and
• exposing said external surface of said semiconductor membrane of said detector to said incident electrons;
• and
• detecting at least a portion of said electrons emitted by said nanopillars on said internal surface of said membrane, thereby detecting said incident electrons.

A method for generating electrons;

• said method comprising the steps:
• providing an electron source for generating incident electrons;
• providing a semiconductor membrane having an external surface positioned to receive said incident electrons from said electron source and an internal surface positioned opposite to said external surface;
• wherein said semiconductor membrane is at least partially transmissive to said incident electrons or is capable of generating secondary electrons or other charged particles from said incident electrons;
• and
• providing an array of semiconductor nanopillars in electrical contact with said internal surface, wherein electrons or other charged particles transmitted or generated by said semiconductor membrane cause at least a portion of said nanopillars on said internal surface to emit electrons, thereby generating electrons.