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US 7,883,832 B2Granted
Method and apparatus for direct referencing of top surface of workpiece during imprint lithography
AssigneeInternational Business Machines Corporation
InventorsMatthew E. Colburn, Yves C. Martin, Theodore G. van Kessel, Hematha K. Wickramasinghe
Life of this patent
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Abstract
An apparatus (and method) for referencing a surface of a workpiece during imprint lithography, includes an air bearing for mechanically referencing a surface of the workpiece, and a lithographic template coupled to the air bearing.
Claims10
An imprint lithography apparatus, comprising:
- an air bearing for mechanically referencing a surface of a workpiece having photoresist deposited thereon;
- a template provided within said air bearing;
- and
- a piezoelectric-actuated ministage holding said template within air bearing, said piezoelectric-actuated ministage coupled to said air bearing.
1 more element
Dependencies are inferred from the claim text.