Back to results
US 7,883,742 B2Granted
Porous materials derived from polymer composites
AssigneeRoskilde Semiconductor LLC
InventorMichael Raymond Ayers
Life of this patent
Estimating the term…
Abstract
This disclosure relates generally to networks of polymers in fullerene compounds and polymers, to methods of preparing precursors for such networks, and to their subsequent use as low dielectric constant materials in microelectronic devices.
Claims15
A method of producing a porous film, comprising:
- providing a functionalized fullerene monomer comprising at least one reactive arm;
- preparing a composite precursor solution comprising the functionalized fullerene monomer and at least one organic polymer porogen;
- applying the composite precursor solution to a substrate;
- curing the functionalized fullerene monomer;
- and
- removing at least a portion of the at least one organic polymer porogen to form a porous film having a three-dimensional network consisting of functionalized fullerenes.
3 more elements
A method of producing a porous film, comprising:
- providing a plurality of fullerenes;
- adding aminohexyltriethoxysilane to the fullerenes, wherein amino groups of the aminohexyltriethoxysilane react with the fullerenes to generate functionalized fullerenes;
- combining the functionalized fullerenes with poly(methyl methacrylate) to generate a composite solution;
- applying the composite solution to a substrate;
- curing the functionalized fullerenes;
- and
- removing at least a portion of the poly(methyl methacrylate) to form a porous film having a three-dimensional network consisting of functionalized fullerenes.
4 more elements
Dependencies are inferred from the claim text.