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US 7,882,747 B2Granted
Strain sensor and method for manufacture thereof
AssigneePanasonic Corporation
InventorsKeiichi Nakao, Yukio Mizukami, Hiroaki Ishida, Koichi Aburata
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Abstract
The invention presents a strain sensor includes a substrate, a crystallized glass laminated on the substrate, a strain sensitive resistor laminated on the crystallized glass, in which the crystallized glass is formed by baking a plurality of types of crystallized glass powder having different thermomechanical constants. As a result, the fluctuation of sensor characteristic is decreased, and the cost is lowered.
Claims21
A strain sensor comprising:
- a substrate;
- a crystallized glass laminated on the substrate;
- a strain sensitive resistor laminated on the crystallized glass;
- and
- a noncrystalline glass interposed between the crystallized glass and the strain sensitive resistor,
- wherein the crystallized glass is a composite crystallized glass formed by baking plural types of crystallized glass powder mutually different in thermomechanical constant.
3 more elements
Dependencies are inferred from the claim text.