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US 7,882,636 B2Granted
Inkjet head, method of manufacturing inkjet head, and inkjet recording apparatus
AssigneeFUJIFILM Corporation
InventorsTsuyoshi Mita, Kazuo Sanada
Life of this patent
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Abstract
An inkjet head, comprising: a pressure chamber which are arranged two-dimensionally, and deformed by pressure generating unit and discharging ink from nozzles communicated with the pressure chamber; and a piezoelectric element which is included in the pressure generating unit, said piezoelectric element including a thin film piezoelectric element formed by means of a thin film forming technique.
Claims7
A method of manufacturing an inkjet head, comprising the steps of:
- two-dimensionally arranging a pressure chamber, deformed by a pressure generating unit comprising a piezoelectric element and discharging ink from nozzles communicated with the pressure chamber;
- forming said piezoelectric element by means of a thin film forming technique;
- forming an upper electrode on a substrate by sputtering, said piezoelectric element being formed on said upper electrode by means of the thin film forming technique;
- and
- forming a lower electrode on said piezoelectric element by sputtering,
- wherein said piezoelectric element has a three-layered structure including said upper electrode, said piezoelectric element and said lower electrode,
- wherein said substrate is removed.
4 more elements
Dependencies are inferred from the claim text.