Method for producing a membrane
AssigneeInfineon Technologies AG
InventorsAlfons Dehé, Stefan Barzen, Marc Fueldner
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Abstract
A method for producing a membrane for a device, e.g. a microphone, includes providing a substrate is provided on which a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sacrificial layer facing away from the counter electrode is structured to form a plurality of recesses in the surface to define one or several antistick elements and one or several corrugation grooves at the same time. Subsequently, a membrane material is deposited on the structured surface of the sacrificial layer. Then, the sacrificial layer is removed to form the membrane, which has one or several corrugation grooves and one or several antistick elements.
Claims17
A method for producing a membrane for a device, comprising the following steps:
- (a) providing a substrate with a counter electrode disposed on the substrate, wherein a sacrificial layer is disposed on a surface of the counter electrode facing away from the substrate;
- (b) structuring the surface of the sacrificial layer facing away from the counter electrode to form a plurality of recesses in the surface to define at least one antistick element and at least one corrugation groove at the same time;
- (c) depositing a membrane material on the structured surface of the sacrificial layer;
- and
- (d) removing the sacrificial layer to form the membrane having at least one corrugation groove and at least one antistick element.
A method for producing a membrane for a device, comprising the following steps:
- (a) providing a substrate with a counter electrode disposed on the substrate, wherein a sacrificial layer is disposed on a surface of the counter electrode that faces away from the substrate;
- (b) structuring the surface of the sacrificial layer facing away from the counter electrode to form a plurality of recesses in the surface to define at least one antistick element and at least one corrugation groove at the same time;
- (c) depositing a membrane material on the structured surface of the sacrificial layer;
- and
- (d) removing the sacrificial layer to form the membrane having at least one corrugation groove and at least one antistick element;
- wherein the at least one antistick element is defined and the at least one corrugation groove is defined such that during a deflection of the membrane to the counter electrode the at least one antistick element comes into contact with the counter electrode.
Dependencies are inferred from the claim text.