Method of positioning movable body

A method of positioning a movable body relative to a fixed body by moving the movable body to a target position, comprising:

• reading a load at the moving of the movable body relative to the fixed body;
• determining whether or not the movable body is moved to a position that is supposed to be the target position on the basis of the load;
• moving the movable body to a retry starting position that is different from a current position while the termination of the positioning is not allowed;
• performing a retry operation in which the movable body is moved from a retry starting position to the position that is supposed to be the target position;
• terminating the positioning;
• wherein in a case where the load is smaller than a predetermined value,
• the positioning is terminated with a determination, in the determining step, that the movable body is moved to the position that is supposed to be the target position, and
• wherein in a case where the load is not smaller than the predetermined value,
• the positioning is not terminated even with a determination, in the determining step, that the movable body is moved to the position supposed to be the target position,
• the movable body is further moved to the retry starting position,
• the retry operation is performed, and
• the positioning is terminated in a case where the load becomes smaller than the predetermined value during a predetermined number of retry operations.