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US 7,880,201 B2Granted
Optical modulator using a serpentine dielectric layer between silicon layers
AssigneeInternational Business Machines Corporation
InventorsYurii A. Vlasov, Fengnian Xia
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Abstract
The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.
Claims16
Apparatus comprising:
- a first silicon layer, the first silicon layer having a plurality of trenches formed therein, wherein the first silicon layer is n-doped;
- a dielectric layer lining the first silicon layer, wherein a cross section of the dielectric layer relative to a direction of propagation of light through the apparatus comprises a substantially serpentine shape;
- a second silicon layer disposed on the dielectric layer and filling the one or more trenches, wherein the second silicon layer is undoped;
- and
- a layer of p-doped silicon disposed between the dielectric layer and the second silicon layer, the layer of p-doped silicon lining the dielectric layer, wherein the layer of p-doped silicon is thinner than the second silicon layer.
2 more elements
Dependencies are inferred from the claim text.