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US 7,879,438 B2Granted
Substrate warpage-reducing structure
AssigneeHong Kong Applied Science and Technology Research Institute Company Limited
InventorsJyh-Rong Lin, Bin Xie, Yeung Yeung, Xunqing Shi, Chang Hwa Chung
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Abstract
The subject matter disclosed herein relates to methods to reduce warpage of a substrate.
Claims8
A device comprising:
- a substrate having a first coefficient of thermal expansion (CTE);
- and
- a first surface-modifying material having a second CTE, said first surface-modifying material disposed on a first surface of said substrate, wherein
- a change in an amount of warpage of said substrate is responsive, at least in part, to a difference between said first CTE and said second CTE during a temperature change of said device, and
- said first surface-modifying material is disposed on said first surface of said substrate in a first pattern that exposes portions of said first surface of said substrate so that said amount of warpage comprises a reduced amount of warpage, wherein said first pattern comprises a pattern of one or more different thicknesses of said first surface-modifying material.
2 more elements
Dependencies are inferred from the claim text.