Systems and methods for target material delivery in a laser produced plasma EUV light source

A device comprising:

• a source of target material droplets delivering target material to an irradiation region along a non-vertical path between the irradiation region and a target material release point;
• an EUV reflective optic;
• a laser producing a beam irradiating droplets at the irradiation region to generate a plasma producing EUV radiation;
• and
• a catch positioned to receive target material to protect the reflective optic.

A source material dispenser for an EUV light source, said dispenser comprising:

• a source material conduit having a wall and formed with an orifice;
• a conductive coating deposited on said wall;
• an insulating coating deposited on said conductive coating;
• a source passing electrical current through said conductive coating to produce heat;
• and
• an electro-actuatable element contacting said insulating coating and operable to deform said wall and modulate a release of source material from said dispenser.