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US 7,869,894 B2Granted
Method and system for advanced process control using a combination of weighted relative bias values
AssigneeAdvanced Micro Devices, Inc.
InventorsJames Broc Stirton, Andre Holfeld
Life of this patent
Estimating the term…
Abstract
By directly using relative biases, contained in the relative bias date matrix, and by appropriately weighting the components thereof, sampling rate limitations in an APC control scheme may be efficiently compensated for. In particular embodiments, an age-based weighting factor is established that scales measurement data uncertainty according to the delay with which the corresponding measurement data for a specific control thread are obtained.
Claims21
A method, comprising:
- performing a specified manufacturing process on a group of substrates in a plurality of equivalent process tools;
- obtaining measurement data of a process output from some of said group of substrates processed by said plurality of equivalent process tools;
- determining updated values of relative biases for each of said plurality of equivalent process tools by comparing said measurement data and based on a current value of said relative biases, said relative biases quantifying a deviation of said process output of said manufacturing process between a respective two of said plurality of equivalent process tools;
- weighting said relative biases an age of said measurement data;
- and
- controlling said manufacturing process said weighted relative biases.
3 more elements
A method, comprising:
- controlling a manufacturing process relative biases, each relative bias associated with a respective one of a plurality of equivalent process tools used in said manufacturing process and being generated by quantifying deviations in measurement data of a process output of the manufacturing process between two respective equivalent process tools;
- and
- determining said relative biases a weighting factor indicating an uncertainty of measurement data associated with a respective one of said relative biases.
A control system, comprising:
- a model-based controller implemented by a processing device and configured to determine at least one updated manipulated variable for a process tool of a process sequence a model, measurement data of a process output associated with said process tool, a relative bias matrix including a plurality of relative biases, each quantifying a deviation of said process output between respective pairs of a plurality of equivalent process tools including said process tool, and a weighting factor for operating on said relative bias matrix, said weighting factor indicating at least one of an age of said measurement data and an uncertainty thereof.
Dependencies are inferred from the claim text.