US 7,867,366 B1Granted

Coaxial plasma arc vapor deposition apparatus and method

AssigneeAlameda Applied Sciences Corp.

InventorsMichael D. McFarland, Mahadevan Krishnan, Jason D. Wright, Andrew N. Gerhan, Benjamin Tang

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Abstract

An apparatus for the deposition of a variable thickness coating onto the inside of a cylindrical tube comprises a variable pressure gas, an cathode coaxially positioned within the cylinder, and a voltage source applied between the cathode and cylindrical tube, which functions as an anode. A radial plasma arc is generated between the anode and cathode at a starting point on the cylinder, and the plasma arc travels down the central axis of the cylinder, providing a helical deposition region on the inside of the cylinder. Selection of the combination of cathode material and gas enable the plasma to generate ionic material which is deposited on the anodic cylinder in the region of the plasma. By varying the pressure of variable pressure gas for each helical path, it is possible to vary the composition of this deposition film.

Claims22

Dependent claims

An apparatus for the deposition of an evaporated material from the outer surface of a cathode onto a cylindrical inner surface of an anode using a plasma, said apparatus comprising:

an enclosed chamber including a vacuum pump and a variable pressure gas source;
said cathode formed from a first conductive material and placed on an axis;
said cylindrical anode formed from a second conductive material, said cylindrical anode placed at a positive electrical potential with respect to said cathode, said cylindrical anode having at least one removable conductive cap attached to a plasma initiation end of said cylindrical anode or to both ends of said cylindrical anode, said cylindrical anode having a constant inner diameter over an extent of said cylindrical anode which includes said at least one removable conductive cap, said removable conductive cap fitting onto the constant inner diameter of said cylindrical anode and electrically connected to said cylindrical anode;
a magnetic field generator located external to said cylindrical anode, said magnetic field generator providing a temporally constant magnetic field oriented substantially parallel to said axis, said magnetic field being unidirectional over a radial extent from said cathode to said anode;
a voltage source delivering a positive voltage to said cylindrical anode and a negative voltage to said cathode, thereby creating and maintaining said plasma;
whereby said plasma has a plasma current which flows between said cathode and said anode and said magnetic field generator produces a magnetic field sufficient to cause said plasma to move helically down said axis at a speed controllable by the strength of said magnetic field such that said evaporated material is deposited on and contained by said inner surface of said anode;
and where at least one said removable conductive cap is located in a region of said anode where macro-particles of initiation or termination of said plasma may form.

4 more elements

A process for the deposition of an evaporated material from the outer surface of a cathode onto the inner surface of a cylindrical anode using a plasma, said process comprising the steps:

a first step of placing inside an enclosed chamber including a vacuum pump and a variable pressure gas source:
said cathode formed from a first conductive material and placed on an axis;
said cylindrical anode formed from a second conductive material, said cylindrical anode placed at a positive electrical potential with respect to said cathode, said cylindrical anode including at least one removable end cap for deposition of plasma macroparticles, said cylindrical anode having a constant inner diameter over an extent of said cylindrical anode which includes said removable end cap attached to one end of said cylindrical anode or to both ends of said cylindrical anode, said end caps fitting onto part of the constant inner diameter of said cylindrical anode and electrically connected to said cylindrical anode;
a magnetic field generator located external to said cylindrical anode, said magnetic field generator providing a temporally constant magnetic field oriented substantially parallel to said axis, said magnetic field being unidirectional over a radial extent from said cathode to said anode;
a voltage source delivering a voltage applied between said cylindrical anode and said cathode;
a second step of initiating a plasma arc from a first end of said cathode, said plasma arc forming a plasma having a plasma current, said plasma forming between said cathode outer surface and said cylindrical anode inner surface, said plasma interacting with said magnetic field to generate a substantially helical rotation of said plasma about said central axis and thereby depositing ions from said cathode onto the inner surface of said anode;
a third step of changing said gas pressure during a repetition of said second step;
a fourth step, after completion of said second step and said third step, of removing said at least one end cap having said macroparticles.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 10/834,592Filed 28 Apr 2004
Granted: 11 Jan 2011
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

C23C 14/325
By explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-plating: electric arc evaporation
C23C 14/046
Coating on selected surface areas, e.g. using masks: coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
C23C 14/0635
Characterised by the coating material: carbides
H01J 37/32055
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources: arc discharge