Wavelength-dispersive X-ray spectrometer
AssigneeJEOL Ltd.
InventorKazuyasu Kawabe
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AssigneeJEOL Ltd.
InventorKazuyasu Kawabe
Estimating the term…
An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractive regions of the analyzing crystal. X-ray blocking plates upstand from an end of a crystal support member supporting the analyzing crystal in the direction of angular dispersion of the crystal toward the inside of a Rowland circle. Incident X-rays going from the point X-ray source toward the crystal and X-rays diffracted by the crystal toward an X-ray detector are partially blocked by the X-ray blocking plates. The shielded regions vary according to the incident angle θ of the incident X-rays. Optimum or nearly optimum effective regions of the surface of the crystal can be used at all times.
A wavelength-dispersive X-ray spectrometer of a straight moving ray-collection type, the spectrometer being fitted to an X-ray microarea-analyzer such as an electron probe microanalyzer, said X-ray spectrometer comprising:
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