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AssigneeMentor Graphics Corporation
InventorsJames Word, Nicolas B. Cobb, Patrick J. LaCour
Estimating the term…
A method of performing a resolution enhancement technique such as OPC on an initial layout description involves fragmenting a polygon that represents a feature to be created into a number of edge fragments. One or more of the edge fragments is assigned an initial simulation site at which the image intensity is calculated. Upon calculation of the image intensity, the position and/or number of initial simulation sites is varied. New calculations are made of the image intensity with the revised placement or number of simulation sites in order to calculate an OPC correction for the edge fragment. In other embodiments, fragmentation of a polygon is adjusted based on the image intensities calculated at the simulation sites. In one embodiment, the image intensity gradient vector calculated at the initial simulation sites is used to adjust the simulation sites and/or fragmentation of the polygon.
A method of preparing a layout file defining features to be created via a photolithographic process for optical and process correction, comprising:
A method of preparing a layout file defining features to be created via a photolithographic process for optical and process correction, comprising:
A method of preparing a layout file defining features to be created via a photolithographic process for optical and process correction, comprising:
A computer readable storage device or memory on which is stored data regarding a layout for a number of features to be created via a photolithographic process, wherein the data are created by:
A method of preparing a layout data file for OPC, comprising:
A computer readable storage device or memory storing a sequence of instructions that when executed by a computer cause the computer to perform a method, the method comprising:
A computer readable storage device or memory storing a sequence of instructions that when executed by a computer cause the computer to perform a method, the method comprising:
A computer readable storage device or memory storing a sequence of instructions that when executed by a computer cause the computer to perform a method, the method comprising:
Dependencies are inferred from the claim text.