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US 7,860,668 B2Granted
Pressure measurement using a MEMS device
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorKasra Khazeni
Life of this patent
Estimating the term…
Abstract
A device to measure pressure is disclosed. In one embodiment, the device includes at least one element with two layers separated by a space which changes over a variable time period in response to a voltage applied across the two layers. The time period may be measured and indicative of the ambient pressure about the device.
Claims22
A device for measuring pressure comprising:
- at least one element comprising two layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a voltage applied across the two layers;
- and
- a measuring module configured to measure the time period, wherein the time period is the time between when a voltage is applied and when a motion of at least one of the layers reaches a maximum velocity and is indicative of the ambient pressure about the device.
A method of measuring pressure comprising:
- applying a voltage across two layers of a microelectromechanical device;
- measuring a response time of the device, wherein the response time is the time between when the voltage is applied and when a motion of at least one of the layers reaches a maximum velocity;
- and
- determining a pressure about the device based on the measured response time.
1 more element
A device for measuring pressure comprising:
- means for applying a voltage across layers of a microelectromechanical device;
- means for measuring a response time of the device, wherein the response time is the time between when the voltage is applied and when a motion of at least one of the layers reaches a maximum velocity;
- and
- means for determining a pressure about the device based on the measured response time.
1 more element
A device for measuring pressure comprising:
- at least one element comprising two conductive layers separated by a space, wherein a dimension of the space changes over a variable time period in response to a change in voltage applied across the two layers;
- a measuring module configured to measure current flowing between the two conductive layers as a function of time when there is a change in voltage applied between the two conductive plates;
- and
- a processor configured to determine the time difference between when the voltage pulse is applied and when the local maximum of the motion current occurs, wherein the processor is further configured to associate the time difference with an ambient pressure.
1 more element
Dependencies are inferred from the claim text.