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US 7,859,685 B2Granted
Wafer center finding with charge-coupled devices
OwnerPaul E. Fogelinventor
Life of this patent
Estimating the term…
Abstract
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.
Claims28
A device comprising:
- a robotic arm within a robot chamber, the robotic arm including an end effector adapted to handle a wafer;
- and
- a linear array of charge-coupled devices within the interior of the robot chamber,
- the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber;
- wherein, the linear array of charge-coupled devices is coupled to the robotic arm and configured so that edge data, captured by the linear array of charge coupled devices, of the wafer resting on the end effector and a transport path of the wafer transported by the robotic arm within the measurement volume define a predetermined position of the wafer in the measurement volume.
2 more elements
A device comprising:
- a robotic arm within a robot chamber, the robotic arm including an end effector adapted to handle a wafer;
- and a linear array of charge-coupled devices on the end effector positioned to capture edge data from a wafer resting on the end effector, and a transport path of the wafer transported by the robotic arm within the measurement volume defines a predetermined position of the wafer in the measurement volume.
Dependencies are inferred from the claim text.