US 7,854,172 B2 · Hermetic chamber with electrical feedthroughs

Abstract

A pressure cavity is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from the ambient in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g. intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.

Claims33

Dependent claims

A device comprising:

a housing having walls defining a chamber, a first one of said walls defining said chamber comprising an exterior wall of said housing;
a passage through said first one of said walls placing the chamber of said housing in communication with the ambient;
and
an electrode hermetically imposed over said passage within said chamber of said housing, whereby said passage is hermetically sealed;
whereby said chamber is hermetically sealed;
and
whereby an external electrical device can be placed in electrical communication with said electrode through said passage.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

12/372,274Filed 17 Feb 2009

Published

US 2009/0145623 A111 Jun 2009

Granted

21 Dec 2010

Term ends

Not estimatedThe source records don’t support an estimate.

Classification13 codes

G01L 9/0075
Using variations in capacitance: using a ceramic diaphragm, e.g. alumina, fused quartz, glass
B81B 7/007
Packages or encapsulation: interconnections between the MEMS and external electrical signals
B81C 1/00301
Processes for packaging MEMS devices: connecting electric signal lines from the MEMS device with external electrical signal lines, e.g. through vias
G01L 9/0073
Using variations in capacitance: using a semiconductive diaphragm

Hermetic chamber with electrical feedthroughs

Life of this patent

Hermetic chamber with electrical feedthroughs

Life of this patent

Abstract

Claims33