Reactive gases with concentrations of increased stability and processes for manufacturing same

A method of making a reactive gas product comprising the steps of:

• a) exposing an internal metal surface of a container to a first fluid composition, comprising a silicon-containing compound for a time sufficient to allow at least some of the silicon-containing compound to react with an oxygen-containing compound present to form a silicon-treated surface on at least some of the internal metal surface, the silicon-containing compound selected from the group consisting of compounds within the general formula:
• SiR1R2R3R4
• wherein R1, R2, R3, and R4 are the same or different and are independently selected from the group consisting of hydrogen, halogen, alkyl, aryl, amine, halogenated alkyl, and halogenated aryl;
• b) evacuating the container for a time sufficient to remove substantially all silicon-containing compound that has not reacted with the oxygen-containing compound to form the silicon-treated surface;
• c) exposing the silicon-treated surface to a second fluid composition, the second fluid composition comprising a reactive gas having a concentration that is at least 10 times greater than the intended reactive gas concentration of the reactive gas product;
• d) evacuating the container for a time sufficient to remove substantially all of the second fluid composition, thus forming a passivated internal metal surface in the container including the silicon treated surface and reactive gas adsorbed on the silicon treated surface;
• and
• e) filling the container with a third fluid composition having the intended reactive gas concentration for the reactive gas product.