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US 7,849,366 B1Granted
Method and apparatus for predicting yield parameters based on fault classification
AssigneeAdvanced Micro Devices, Inc.
InventorMatthew A. Purdy
Life of this patent
Estimating the term…
Abstract
A method includes receiving fault classification data associated with a fault condition and estimating at least one yield parameter based on the fault classification data. A system includes a fault classification unit and a yield estimation unit. The fault classification unit is adapted to generate fault classification data associated with a fault condition, and the yield estimation unit is adapted to estimate at least one yield parameter based on the fault classification data.
Claims24
A method, comprising:
- receiving fault classification data associated with a tool fault condition, the tool fault condition being associated with a process tool for processing a wafer;
- and
- estimating at least one yield parameter of the wafer based on the fault classification data, wherein estimating the at least one yield parameter further comprises estimating a performance yield parameter, and the performance yield parameter further comprises a speed yield parameter.
A system, comprising:
- a fault classification unit adapted to generate fault classification data associated with a tool fault condition, the tool fault condition being associated with a process tool for processing a wafer;
- and
- a yield estimation unit adapted to estimate at least one yield parameter of the wafer based on the fault classification data, wherein the at least one yield parameter further comprises a performance yield parameter, and the performance yield parameter further comprises a speed yield parameter.
A method, comprising:
- receiving fault classification data associated with a fault condition;
- and
- estimating at least one speed yield parameter based on the fault classification data.
A system, comprising:
- a fault classification unit adapted to generate fault classification data associated with a fault condition;
- and
- a yield estimation unit adapted to estimate at least one speed yield parameter based on the fault classification data.
Dependencies are inferred from the claim text.