Ultra high speed uniform plasma processing system

An apparatus for plasma processing a plurality of substrates, the apparatus comprising:

• a first electrode;
• a second electrode positioned with a spaced apart relationship relative to said first electrode;
• a third electrode positioned between said first electrode and said second electrode;
• a first separating member directly contacting said first electrode and directly contacting said third electrode forming a first sidewall extending between said first electrode and said third electrode, said first electrode configured to support one of the plurality of substrates in said first processing region for plasma processing, and said first separating member comprising a dielectric material for electrically isolating said first electrode from said third electrode;
• a first processing region formed by said first separating member, said first electrode, and said third electrode;
• a second separating member directly contacting said second electrode and directly contacting said third electrode forming a second sidewall extending between said second electrode and said third electrode, said second electrode configured to support one of the plurality of substrates in said second processing region for plasma processing, and said second separating member comprising a dielectric material for electrically isolating said second electrode from said third electrode;
• a second processing region formed by said second separating member, said second electrode, and said third electrode;
• at least one process gas port for introducing a process gas to said first processing region and second processing region;
• a vacuum port in said first electrode for evacuating said first and second processing regions to a sub-atmospheric pressure suitable for generating the plasma from the process gas in said first processing region and said second processing region;
• an electrically conductive shell surrounding said first electrode, said second electrode, said third electrode, said first separating member, and said second separating member;
• and
• an atmospheric pressure space between said shell and said first electrode, said second electrode, said third electrode, said first separating member, and said second separating member.