Ink jet device having piezoelectric actuator with insulating structure and method of producing the piezoelectric actuator
AssigneeOce-Technologies B.V.
InventorsDavid D. L. Wijngaards, Hans Reinten, Hendrik J. Stolk, Alex N. Westland
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Abstract
A piezoelectric actuator having a bottom electrode attached to a membrane, a piezoelectric layer on the bottom electrode, and a top electrode formed on the piezoelectric layer, wherein the bottom electrode extends substantially over the entire bottom surface of the piezoelectric layer, and at least a peripheral portion of a top surface of the piezoelectric layer and side faces of that layer are covered with an insulating layer, and wherein in the peripheral portion of the top surface of the piezoelectric layer the top electrode is superposed on the insulating layer.
Claims19
An ink jet device comprising at least one piezoelectric actuator, said piezoelectric actuator comprising:
- a piezoelectric layer provided with a top surface and a bottom surface,
- a top electrode formed on said top surface and a bottom electrode extending over the entire bottom surface of said piezoelectric layer, said bottom electrode being attached to a membrane, wherein
- at least a peripheral portion of said top surface of the piezoelectric layer as well as the side faces of the piezoelectric layer are covered with an insulating material, and said top electrode is superimposed on said insulating material covering said peripheral portion of the piezoelectric layer.
Dependencies are inferred from the claim text.