High level integration phase change memory device having an increased diode junction area and method for manufacturing the same
AssigneeHynix Semiconductor Inc.
InventorKyung Do Kim
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AssigneeHynix Semiconductor Inc.
InventorKyung Do Kim
Estimating the term…
A phase change memory device includes a semiconductor substrate active region, a plurality of first conductivity type silicon pillars, and a plurality of second conductivity type silicon patterns. The plurality of first conductivity type silicon pillars is formed on the semiconductor active region such that each first conductivity type silicon pillar is provided for two adjoining cells. The plurality of second conductivity type silicon patterns is formed on the plurality of first conductivity type silicon pillars such that two second conductivity type silicon patterns are formed on opposite sidewalls of each first conductivity type silicon pillars. Two adjoining cells together share only one first conductivity type silicon pillar and each adjoining cell is connected to only one second conductivity type silicon pattern which constitutes a PN diode which serves as a single switching element for each corresponding cell.
A phase change memory device comprising:
A method for manufacturing a phase change memory device, comprising the steps of:
Dependencies are inferred from the claim text.