MIM capacitors with catalytic activation layer
AssigneeInfineon Technologies AG
InventorsHans-Joachim Barth, Petra Felsner, Erdem Kaltalioglu, Gerald R. Friese
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Abstract
An embodiment of a MIM capacitor includes a first insulating layer formed over a wafer and a first capacitor plate formed over the wafer within the first insulating layer. The MIM capacitor further includes a second insulating layer formed over the first insulating layer, a capacitor dielectric formed over the first capacitor plate within the second insulating layer and a second capacitor plate formed over the capacitor dielectric within the second insulating layer. A recess is formed in the second capacitor plate below an upper surface of the second insulating layer and a catalytic activation layer is formed in the recess.
Claims20
A metal-insulator-metal (MIM) capacitor, comprising:
- a first insulating layer formed over a wafer;
- a first capacitor plate formed over the wafer within the first insulating layer;
- a second insulating layer formed over the first insulating layer;
- a capacitor dielectric formed over the first capacitor plate within the second insulating layer;
- a second capacitor plate formed over the capacitor dielectric within the second insulating layer, the second capacitor plate having a recess formed therein below an upper surface of the second insulating layer;
- and
- a catalytic activation layer formed in the recess.
A metal-insulator-metal (MIM) capacitor, comprising:
- a first insulating layer formed over a wafer;
- a first capacitor plate formed over the wafer within the first insulating layer, the first capacitor plate having a recess formed therein below an upper surface of the first insulating layer;
- and
- a catalytic activation layer formed in the recess.
Dependencies are inferred from the claim text.