Electromechanical switch
AssigneePanasonic Corporation
InventorsYasuyuki Naito, Yoshito Nakanishi
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Abstract
An electromechanical filter of the present invention is an electromechanical switch formed on a substrate. The switch has a fixed electrode which is to become a signal transmission line, and a movable electrode formed in a levitating manner while being spaced from the fixed electrode with a gap therebetween. An insulating film is provided on the fixed electrode, and an actuator is formed around the movable electrode formed on a post section. Thereby, an electromechanical switch equipped with a movable electrode fixing mechanism which prevents occurrence of self-actuation, which has hitherto been difficult to realize, is materialized.
Claims22
An electromechanical switch comprising:
- a first electrode;
- and
- a second electrode which is formed while being spaced from the first electrode by way of a gap and is formed so as to be able to contact the first electrode by means of displacement induced by electrostatic force,
- wherein the second electrode has a movable actuator for preventing a driving force of the second electrode in a direction toward the first electrode.
The electromechanical switch according to 1, wherein the actuator is a piezoelectric actuator including a bimorph and a unimorph element.
Dependencies are inferred from the claim text.