Camera based vision alignment with device group guiding for semiconductor device testing handlers
AssigneeDelta Design, Inc.
InventorsKexiang Ken Ding, Luis Muller, John Marquez
Life of this patent
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Abstract
A vision alignment system and method is provided. The vision alignment system includes one or more grouped alignment plates with guiding inserts configured to receive multiple devices, and groups of three actuators, configured to actuate the alignment plates to correct the position offsets of multiple devices as a group. The position offsets between the device and contactor are determined by a device-view camera during runtime and a contactor-view camera during calibration time. The vision alignment system also includes a pick-and-place handler, configured to transport devices.
Claims9
A vision alignment system, comprising:
- a first camera, configured to view the position of a plurality of contactors;
- a pick-and-place handler, configured to transport a plurality of devices;
- a second camera, configured to find a position of each device;
- a plurality of alignment plates, configured to receive one or more devices, each having a guiding insert to correct the position offset of the devices;
- and
- a plurality of actuator sets, configured to actuate the alignment plates.
A method for calibrating a vision alignment system for a test handler comprising the steps of:
- aligning a training device mounted onto an alignment plate with a contactor;
- recording the position of the alignment plate, the contactor and a plurality of actuators to define the contactor location;
- and
- transforming the contactor location to an alignment coordinate system for the detection of position offset in images captured by a device-view camera.
A method for aligning semiconductor devices for testing, comprising the steps of:
- providing a plurality of semiconductor devices;
- determining a position offset between each of the plurality of semiconductor devices and a defined alignment coordinate system, wherein the alignment coordinate system corresponds to a position of a contactor;
- using a set of actuators to position alignment plates having guiding inserts so that their guiding insert positions correspond to a reference coordinate system;
- and
- engaging each of the plurality of semiconductor devices with the contactor through the pre-aligned guiding inserts.
Dependencies are inferred from the claim text.